Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 전형탁 | - |
dc.date.accessioned | 2018-03-16T07:12:30Z | - |
dc.date.available | 2018-03-16T07:12:30Z | - |
dc.date.issued | 2014-02 | - |
dc.identifier.citation | JOURNAL OF APPLIED PHYSICS; FEB 21 2014, 115, 7, 7p | en_US |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | https://aip.scitation.org/doi/abs/10.1063/1.4866001 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/48051 | - |
dc.description.abstract | Al2O3 films deposited by remote plasma atomic layer deposition have been used for thin film encapsulation of organic light emitting diode. In this study, a multi-density layer structure consisting of two Al2O3 layers with different densities are deposited with different deposition conditions of O-2 plasma reactant time. This structure improves moisture permeation barrier characteristics, as confirmed by a water vapor transmission rate (WVTR) test. The lowest WVTR of the multi-density layer structure was 4.7 x 10(-5) gm(-2) day(-1), which is one order of magnitude less than WVTR for the reference single-density Al2O3 layer. This improvement is attributed to the location mismatch of paths for atmospheric gases, such as O-2 and H2O, in the film due to different densities in the layers. This mechanism is analyzed by high resolution transmission electron microscopy, elastic | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA | en_US |
dc.subject | GAS-DIFFUSION BARRIERS | en_US |
dc.subject | LIGHT-EMITTING-DIODES | en_US |
dc.subject | POLYMERS | en_US |
dc.subject | FILMS | en_US |
dc.title | Al2O3 multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition | en_US |
dc.type | Article | en_US |
dc.relation.no | 7 | - |
dc.relation.volume | 115 | - |
dc.identifier.doi | 10.1063/1.4866001 | - |
dc.relation.page | 73502-73507 | - |
dc.relation.journal | JOURNAL OF APPLIED PHYSICS | - |
dc.contributor.googleauthor | Jeon, Hyeongtag | - |
dc.contributor.googleauthor | Jung, Hyunsoo | - |
dc.contributor.googleauthor | Choi, Hagyoung | - |
dc.contributor.googleauthor | Ham, Giyul | - |
dc.contributor.googleauthor | Shin, Seokyoon | - |
dc.relation.code | 2014032385 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | hjeon | - |
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