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Correlation of the structural properties of a Pt seed layer with the perpendicular magnetic anisotropy features of full Heusler-based Co2FeAl/MgO/Co2Fe6B2 junctions via a 12-inch scale Si wafer process

Title
Correlation of the structural properties of a Pt seed layer with the perpendicular magnetic anisotropy features of full Heusler-based Co2FeAl/MgO/Co2Fe6B2 junctions via a 12-inch scale Si wafer process
Other Titles
MgO
Author
박재근
Keywords
Magnetic annealing; Condensed matter properties; Magnetic memories; Crystallography; Materials properties; Atmospheric composition; Interfaces; Magnetism; Surface and interface chemistry; Magnetic ordering
Issue Date
2013-10
Publisher
AMER INST PHYSICS, CIRCULATION & FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA
Citation
APPLIED PHYSICS LETTERS, 2013, 103(16), P.162409-
Abstract
We elucidated the interfacial-perpendicular magnetic anisotropy (i-PMA) features of full Heusler-based Co2FeAl/MgO/Co2Fe6B2 magnetic-tunnel-junctions as functions of the structural properties of the Pt seed layer including its thickness and ex situ annealing temperature. All of the samples were prepared in a 12-inch silicon wafer process for real industry applications. The observations of the M-H loops emphasize that a thinner Pt seed layer and a high ex situ annealing temperature enhance the surface roughness of the seed layer, providing better i-PMA characteristics. HR-TEM images of the samples were evaluated to understand the structural effects of thin and thick Pt seed layers. (C) 2013 AIP Publishing LLC.
URI
http://aip.scitation.org/doi/abs/10.1063/1.4824306http://hdl.handle.net/20.500.11754/44834
ISSN
0003-6951; 1077-3118
DOI
10.1063/1.4824306
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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