Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2018-02-15T04:29:13Z | - |
dc.date.available | 2018-02-15T04:29:13Z | - |
dc.date.issued | 2011-06 | - |
dc.identifier.citation | Journal of Physics. D, Applied Physics, Vol.44 No.28 [2011], 285203 | en_US |
dc.identifier.issn | 0022-3727 | - |
dc.identifier.uri | http://iopscience.iop.org/article/10.1088/0022-3727/44/28/285203/meta | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/37682 | - |
dc.description.abstract | The line-ratio method of optical emission spectroscopy (OES) is used for the diagnosis of plasma parameters. In this work, electrostatic probe-assisted OES is employed to measure metastable level densities from spectral lines and electron energy distribution functions (EEDFs) in a low-pressure inductively coupled argon plasma. Emission spectroscopy is based on plasma modelling through a simple collisional-radiative model. The line intensities of Ar(3p(5)4p -> 3p(5)4s) are modified due to the plasma reabsorption at relatively high pressures where the plasma becomes optically thick. To consider this effect, a pressure dependence factor alpha(ij) (P) is first derived from both the measured intensity and pressure-dependent cross-section for electron excitation. It is found that the obtained metastable densities range from 1.3 x 10(9) to 1.2 x 10(10) cm(-3) and their ratios are nearly constant by a factor of about 3-5 in the investigated pressure range (3-50m Torr). The effect of non-Maxwellian EEDF on the metastable densities is also discussed. The results measured by the line-ratio method are consistent with that of the OES-branching fraction method taking into account the photon escape factor to treat the radiation trapping. | en_US |
dc.description.sponsorship | This work was supported by the Basic Science Research Program through the National Research Foundation of Korea NRF grant funded by MEST (2011-0029418, 2011-0020061) and Technology Innovation Program through NRF grant funded by MKE (2011-10034827). | en_US |
dc.language.iso | en | en_US |
dc.publisher | IOP PUBLISHING LTD, DIRAC HOUSE, TEMPLE BACK, BRISTOL BS1 6BE, ENGLAND | en_US |
dc.title | Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy | en_US |
dc.type | Article | en_US |
dc.relation.no | 28 | - |
dc.relation.volume | 44 | - |
dc.identifier.doi | 10.1088/0022-3727/44/28/285203 | - |
dc.relation.page | 285203-285210 | - |
dc.relation.journal | JOURNAL OF PHYSICS D-APPLIED PHYSICS | - |
dc.contributor.googleauthor | Lee, Young-Kwang | - |
dc.contributor.googleauthor | Moon, Se-Youn | - |
dc.contributor.googleauthor | Oh, Se-Jin | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.relation.code | 2011205648 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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