Measurement of the sheath capacitance of a planar probe
- Title
- Measurement of the sheath capacitance of a planar probe
- Author
- 정진욱
- Keywords
- high-frequency discharges; plasma boundary layers; plasma probes; plasma sheaths; plasma transport processes; Poisson equation
- Issue Date
- 2011-10
- Publisher
- AMERICAN INSTITUTE OF PHYSICS
- Citation
- PHYSICS OF PLASMAS,18(10),103511
- Abstract
- he sheath capacitance was measured on a planar probe dc-biased with respect to the plasma potential using the phase sensitive detection method in the region separated from the rf discharge plasmas by an immersed grid. It was observed that the sheath capacitance was negative when the collecting electrode of the probe was positioned downward toward the grid and biased near the plasma potential. This indicates that a double sheath had built up near the probe electrode. This tendency can be explained by the sheath capacitance, which is calculated using Poisson's equation with a non-zero electrical field and an ion velocity condition at the sheath edge. (C) 2011 American Institute of Physics. [doi:10.1063/1.3646476]
- URI
- http://aip.scitation.org/doi/10.1063/1.3646476
- ISSN
- 1070-664X
- DOI
- 10.1063/1.3646476
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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