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Effect of Molecular Weight of Polyvinylpyrrolidone on Corrosion-Inhibition Efficiency of Polycrystalline Ge2Sb2Te5 Film

Title
Effect of Molecular Weight of Polyvinylpyrrolidone on Corrosion-Inhibition Efficiency of Polycrystalline Ge2Sb2Te5 Film
Author
박재근
Issue Date
2012-01
Publisher
ELECTROCHEMICAL SOC INC, 65 SOUTH MAIN STREET, PENNINGTON, NJ 08534 USA
Citation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 권: 159, 호: 4, 페이지: H412-H416
Abstract
As for chemical mechanical polishing (CMP) of polycrystalline Ge2Sb2Te5 (pc-GST), the corrosion-inhibition efficiency and polishing rate of 1-vinyl-2-pyrrolidinone (VP) and polyvinyl pyrrolidone (PVP) with molecular weights of 3.5 k, 25 k, and 1300 k g/mol were estimated. The estimation results show that there is an optimal molecule weight of the corrosion inhibitor (i.e., 3.5 k g/mol) to achieve free of corrosion pits and the lowest surface roughness after polishing test. These results demonstrate that the formation of a uniform polymeric passivation layer arising from a corrosion inhibitor can prevent a direct penetration of the oxidizer H2O2 at the optimum molecule weight of the corrosion inhibitor during the pc-GST CMP. (C) 2012 The Electrochemical Society. [DOI: 10.1149/2.032204jes] All rights reserved.
URI
http://jes.ecsdl.org/content/159/4/H412.shorthttp://hdl.handle.net/20.500.11754/36907
ISSN
0013-4651
DOI
10.1149/2.032204jes
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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