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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-4 of 4 (Search time: 0.007 seconds).
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Issue Date
Title
Author(s)
2008-02
Ellipsometric inspection of the inner surface of pellicle-covered masks
안일신
2018-04
Characterization of Free-Standing Nano-Membranes by Using Ellipsometry
안일신
2001-09
Parameter extraction for 193 nm chemically amplified resist from refractive index change
안일신
2004-06
The Extraction of Develop Parameters by Using Cross-Sectional Critical Shape Error Method
안일신
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Ellipsometry
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Pellicle
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Amplified deprotection reaction
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CCSE
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CHEMICALLY AMPLIFIED RESIST
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chemically amplified resist
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Chemically amplified resists
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Computer simulation
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develop parameter
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development
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-Date issued
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2010 - 2018
3
2001 - 2009
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