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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-5 of 5 (Search time: 0.001 seconds).
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Title
Author(s)
2008-02
Ellipsometric inspection of the inner surface of pellicle-covered masks
안일신
2018-04
Characterization of Free-Standing Nano-Membranes by Using Ellipsometry
안일신
2012-03
Is extreme-ultraviolet pellicle possible? - In terms of heat absorption
김지원
2012-10
Temperature behavior of pellicles in extreme ultraviolet lithography
김지원
2015-08
Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography
김지원
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김지원
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안일신
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Lithography
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Deflection
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Deformation
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EUV
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EUV lithography
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EUVL
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Extreme UV
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