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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 51-60 of 253 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2008-09
Optimum Biasing for 45nm Node Chromeless and Attenuated Phase Shift Mask
안일신
2008-09
Investigation of Laminated High-k Oxides by Using Vacuum Ultraviolet Spectroscopic Ellipsometry
안일신
2008-02
Optimum Dose Variation Caused By Post Exposure Bake Temperature Difference Inside Photoresist Over Different Sublayers And Thickness
안일신
2008-02
32 nm 1:1 line and space patterning by resist reflow process
안일신
2008-02
Resist reflow process for arbitrary 32 nm node pattern
안일신
2008-02
Ellipsometric inspection of the inner surface of pellicle-covered masks
안일신
2007-03
Ellipsometric studies of the absorption of liquid by photo resist
안일신
2008-10
Development of vacuum ultraviolet multichannel ellipsometry and its application to the characterization of ultrathin zirconium oxide films
안일신
2008-11
A Mask Generation Approach to Double Patterning Technology with Inverse Lithography
안일신
2008-11
Patterning of 32 nm 1:1 Line and Space by Resist Reflow Process
안일신
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-Author
89
심종인
77
안일신
45
신동수
26
차민철
11
김지원
4
김수은
1
어영선
-Subject
11
ellipsometry
7
signal integrity
6
Ellipsometry
5
lithography
5
optical proximity correction (OPC)
4
bias
4
light-emitting diodes (LEDs)
4
quantum well
4
saturation
4
shielding effect
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-Date issued
17
2009
38
2008
17
2007
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2006
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2005
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2004
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2003
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2002
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2001
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