열해석 기반 증착 시스템 구조 최적 설계에 관한 연구

Abstract

One of the most affective factors for thin film uniformity in vacuum deposition system is temperature distribution. In this research, design optimization based on CAE which is related to thermal analysis was performed to minimize temperature distribution in evaporation system. In order to minimize the distribution, various parts of evaporation system were changed within the design range. Heat Analysis was performed using ABAQUS. Based on thermal analysis results which are obtained from various analyses, we conducted an optimal design. It was conducted by commercial optimization software. After generating the approximation model based on the DOE data, an optimal design was performed. As a result, the temperature distribution was improved compared to conventional designs