Heterogeneous 3D Sequential CFET with Ge (110) Nanosheet p-FET on Si (100) bulk n-FET by Direct Wafer Bonding
- Title
- Heterogeneous 3D Sequential CFET with Ge (110) Nanosheet p-FET on Si (100) bulk n-FET by Direct Wafer Bonding
- Author
- 김영현
- Keywords
- Bioengineering; Communication; Networking and Broadcast Technologies; Components; Circuits; Devices and Systems; Computing and Processing; Engineered Materials; Dielectrics and Plasmas; Fields; Waves and Electromagnetics; Photonics and Electrooptics; Power; Energy and Industry Applications; Robotics and Control Systems; Signal Processing and Analysis; Wafer bonding; Temperature measurement; Fabrication; MOSFET; Temperature dependence; Three-dimensional displays; Crystals
- Issue Date
- 2023-01-23
- Publisher
- IEEE
- Citation
- 2022 International Electron Devices Meeting (IEDM)
- Abstract
- In this work, we demonstrated 3D sequential complementary field-effect-transistor (CFET) by direct wafer bonding (DWB) technique and a low-temperature process for monolithic 3D (M3D) integration using a high-performance top Ge (110)/<110> channel on bottom Si CMOS. Here, the maximum thermal budget was up to 400 °C during the fabrication of top Ge FET, allowing high-performance heterogenous Ge/Si CFET without damage to bottom Si FETs. Furthermore, we systematically investigated the mobility enhancement to channel orientation in thin Ge (110) nanosheet channel pFET. Low effective hole mass along <110> direction on Ge (110), which was calculated by the k·p method, provided record high mobility of approximately 400 cm2 /V∙s (corresponds to 743 cm2 /V∙s when normalized by footprint) among the reported Ge pFET with similar channel thicknesses at room temperature.
- URI
- https://information.hanyang.ac.kr/#/eds/detail?an=edseee.10019551&dbId=edseeehttps://repository.hanyang.ac.kr/handle/20.500.11754/189561
- ISSN
- 2156-017X
- DOI
- 10.1109/IEDM45625.2022.10019551
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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