Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 안강호 | - |
dc.date.accessioned | 2023-06-30T01:26:14Z | - |
dc.date.available | 2023-06-30T01:26:14Z | - |
dc.date.issued | 2006-10 | - |
dc.identifier.citation | Key Engineering Materials, v. 321-323, Page. 1707-1710 | - |
dc.identifier.issn | 1013-9826;1662-9795 | - |
dc.identifier.uri | https://www.scientific.net/KEM.321-323.1707 | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/182600 | - |
dc.description.abstract | A feasibility test for real-time fine particle measurements in vacuum semiconductor processing equipment has been conducted. The approach in monitoring particles in process equipment is an installation of a sensor at a critical location inside the process equipment (hence the term 'in-situ') to track free particle levels in real-time. Common method for particle detection in a process chamber today is a use of test wafer with a laser wafer scanner. However, this method does not give a real time information of the particle status in the process chamber. In this paper, a new method has been developed to detect particles in real time in vacuum system for particles smaller than an optical method can detect. The system consists of a particle charging region and a particle detection region in a vacuum system. Particles with 50nm are successfully detected at about 10 torr region. | - |
dc.language | en | - |
dc.publisher | Trans Tech Publications Ltd. | - |
dc.subject | particle charging in vacuum | - |
dc.subject | vacuum particle | - |
dc.subject | semiconductor processing equipment | - |
dc.subject | monodisperse particle | - |
dc.subject | corona charging | - |
dc.subject | Faraday cup | - |
dc.title | Development of in-situ SUB-100nm particle detection in vacuum system | - |
dc.type | Article | - |
dc.relation.volume | 321-323 | - |
dc.identifier.doi | 10.4028/www.scientific.net/KEM.321-323.1707 | - |
dc.relation.page | 1707-1710 | - |
dc.relation.journal | Key Engineering Materials | - |
dc.contributor.googleauthor | Ahn, Kang-Ho | - |
dc.contributor.googleauthor | Kim, Yong-min | - |
dc.sector.campus | E | - |
dc.sector.daehak | 공학대학 | - |
dc.sector.department | 기계공학과 | - |
dc.identifier.pid | khahn | - |
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