Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods
- Title
- Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods
- Author
- 이정호
- Keywords
- THIN-FILMS; SOLAR-CELLS; OXIDE; SILICON NANOWIRES; LIGHT-EMITTING DEVICES; ABSORPTION; ATOMIC LAYER DEPOSITION; SCATTERING
- Issue Date
- 2010-00
- Publisher
- Electrochemical Society, Inc.
- Citation
- Electrochemical and Solid-State Letters, v. 13, NO. 2, Page. K12-K14
- Abstract
- Al-doped ZnO (AZO) thin films were grown by atomic layer deposition (ALD) for use as transparent conductive oxides on high aspect ratio Si microrod arrays. The ALD-deposited AZO films showed high optical transmittance and electrical conductivity despite their polycrystalline structures and resulted in a superior conformal coating on the surface and side regions of the Si microrods. The films also exhibited an electrical performance identical to that of the AZO film on a flat Si substrate. These results revealed that ALD-deposited AZO films are promising candidates for electrodes in the next-generation optoelectronic devices based on low dimensional structures, which require conformal coating. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3267051] All rights reserved.
- URI
- https://iopscience.iop.org/article/10.1149/1.3267051https://repository.hanyang.ac.kr/handle/20.500.11754/181406
- ISSN
- 1099-0062
- DOI
- 10.1149/1.3267051
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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