Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2023-05-24T02:38:21Z | - |
dc.date.available | 2023-05-24T02:38:21Z | - |
dc.date.issued | 1999-02 | - |
dc.identifier.citation | Surface and Coatings Technology, v. 112, NO. 1-3, Page. 48-51 | - |
dc.identifier.issn | 0257-8972;1879-3347 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0257897298008068?via%3Dihub | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/181319 | - |
dc.description.abstract | The purpose of this study was to explore the deposition of low-energy organic films for the prevention of stiction in MEMS (micro electro mechanical systems). Perfluorinated thin films were deposited by the spin coating of fluorocarbon chemicals (FC) and the vapour-phase (VP) adsorption of FC and perfluorodecanoic acid (PFDA) on Al substrates. AFM and contact angle measurements showed poor coverage of the films on aluminium, especially when they were deposited by VP adsorption. The contact angles for water on the spin- and VP-deposited films were similar or higher than on Teflon. The surface energy of FC-and PFDA-coated films was calculated to be lower than that for a Teflon surface. ATR (attenuated total reflectance)-FTIR spectra showed CF2 stretching bands on spin- and VP-deposited films on aluminium. The spin-coated FC films showed good thermal stability at 150 degrees C for 100 h in air. The VP-deposited PFDA and FC films showed degradation as a function of time in an air atmosphere, but not in nitrogen at the same temperature. (C) 1999 Elsevier Science S.A. All rights reserved. | - |
dc.description.sponsorship | This research was supported by the Ministry of Science and Technology and the Ministry of Industry and Energy under the Micromachine Technology Development Program. Special thanks go to Professor Jae-Bum Choo of Hanyang University for the ATR-FTIR analysis. | - |
dc.language | en | - |
dc.publisher | Elsevier BV | - |
dc.subject | aluminium | - |
dc.subject | perfluoro-organic thin films | - |
dc.subject | spin coating | - |
dc.subject | vapour-phase adsorption | - |
dc.subject | contact angles | - |
dc.title | Preparation and characterization of perfluoro-organic thin films on aluminium | - |
dc.type | Article | - |
dc.relation.no | 1-3 | - |
dc.relation.volume | 112 | - |
dc.identifier.doi | 10.1016/S0257-8972(98)00806-8 | - |
dc.relation.page | 48-51 | - |
dc.relation.journal | Surface and Coatings Technology | - |
dc.contributor.googleauthor | Lee, Sang ho | - |
dc.contributor.googleauthor | Kwon, Myong jong | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.contributor.googleauthor | Kim, Yong kweon | - |
dc.contributor.googleauthor | Shin, Hyung jae | - |
dc.sector.campus | E | - |
dc.sector.daehak | 공학대학 | - |
dc.sector.department | 재료화학공학과 | - |
dc.identifier.pid | jgpark | - |
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