Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2023-05-24T01:27:26Z | - |
dc.date.available | 2023-05-24T01:27:26Z | - |
dc.date.issued | 2011-00 | - |
dc.identifier.citation | ECS Transactions, v. 41, NO. 5, Page. 131-138 | - |
dc.identifier.issn | 1938-5862;1938-6737 | - |
dc.identifier.uri | https://iopscience.iop.org/article/10.1149/1.3630836 | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/181234 | - |
dc.description.abstract | A possible candidate for carbon contaminant removal in Ru capped EUVL mask is ozone dissolved water (DIO 3). However, the use of DIO 3 leaves reflectivity loss and serious surface damages on Ru capping layer caused by its high oxidation potential. In this study, an optimum DIO 3 cleaning condition for effective carbon cleaning without surface damage was investigated both theoretically and experimentally. The effect of additive gases such as O 2, CO 2 and N 2 of various concentrations were tried during DIO 3 generation for oxidation stability on Ru capping layer and N 2 added 15 ppm DIO 3 was found to be the best condition. However carbon contaminant was ineffectively removed at this condition. Thus megasonic is irradiated during DIO 3 process and the results show that carbon is not only completely removed in a shorter time but also lower reflectivity loss was accomplished with minimal increase in the surface roughness. ©The Electrochemical Society. | - |
dc.language | en | - |
dc.publisher | Electrochemical Society, Inc. | - |
dc.title | Optimization of DIO 3with megasonic cleaning of Ru capped EUVL mask for effective carbon contaminant removal | - |
dc.type | Article | - |
dc.relation.no | 5 | - |
dc.relation.volume | 41 | - |
dc.identifier.doi | 10.1149/1.3630836 | - |
dc.relation.page | 131-138 | - |
dc.relation.journal | ECS Transactions | - |
dc.contributor.googleauthor | Lee, Seung Ho | - |
dc.contributor.googleauthor | Kang, Bong Kyun | - |
dc.contributor.googleauthor | Kim, Min su | - |
dc.contributor.googleauthor | Lim, Jungsoo | - |
dc.contributor.googleauthor | Jeong, Ji hyun | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.sector.campus | E | - |
dc.sector.daehak | 공학대학 | - |
dc.sector.department | 재료화학공학과 | - |
dc.identifier.pid | jgpark | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.