듀얼 디퓨저 리소그래피를 이용한 3 차원 마이크로 구조의 제작
- Title
- 듀얼 디퓨저 리소그래피를 이용한 3 차원 마이크로 구조의 제작
- Other Titles
- Fabrication of 3D Micro Structure by Dual Diffuser Lithography
- Author
- 박진구
- Keywords
- 3D micro structure; dual diffuser; diffuser lithography; ground glass diffuser; opal glass diffuser.
- Issue Date
- 2013-08
- Publisher
- 한국재료학회
- Citation
- Korean Journal of Materials Research, v. 23, NO. 8, Page. 447-452
- Abstract
- Recently, products that a have 3-dimensional(3D) micro structure have been in wide use. To fabricate these 3D micro structures, several methods, such as stereo lithography, reflow process, and diffuser lithography, have been used. However,these methods are either very complicated, have limitations in terms of patterns dimensions or need expensive components. To overcome these limitations, we fabricated various 3D micro structures in one step using a pair of diffusers that diffract the incident beam of UV light at wide angles. In the experiment, we used positive photoresist to coat the Si substrate. A pair of diffusers(ground glass diffuser, opal glass diffuser) with Gaussian and Lambertian scattering was placed above the photomask in the passage of UV light in the photolithography equipment. The incident rays of UV light diffracted twice at wider angles while passing through the diffusers. After exposure, the photoresist was developed fabricating the desired 3D micro structure.
These micro structures were analyzed using FE-SEM and 3D-profiler data. As a result, this dual diffuser lithography(DDL)technique enabled us to fabricate various microstructures with different dimensions by just changing the combination of diffusers, making this technology an efficient alternative to other complex techniques.
- URI
- http://koreascience.or.kr/article/JAKO201326940561727.pagehttps://repository.hanyang.ac.kr/handle/20.500.11754/181200
- ISSN
- 1225-0562;2287-7258
- DOI
- 10.3740/MRSK.2013.23.8.447
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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