183 0

이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발

Title
이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발
Other Titles
Optimization of FPD Cleaning System and Processing by Using a Two-Phase Flow Nozzle
Author
박진구
Keywords
flat panel display; two-phase flow nozzle; air-knife; particle removal
Issue Date
2014-00
Publisher
한국재료학회
Citation
Korean Journal of Materials Research, v. 24, NO. 8, Page. 429-433
Abstract
As the fabrication technology used in FPDs(flat-panel displays) advances, the size of these panels is increasing andthe pattern size is decreasing to the um range. Accordingly, a cleaning process during the FPD fabrication process is becomingmore important to prevent yield reductions. The purpose of this study is to develop a FPD cleaning system and a cleaningprocess using a two-phase flow. The FPD cleaning system consists of two parts, one being a cleaning part which includes atwo-phase flow nozzle, and the other being a drying part which includes an air-knife and a halogen lamp. To evaluate theparticle removal efficiency by means of two-phase flow cleaning, silica particles 1.5 μm in size were contaminated onto a sixinchsilicon wafer and a four-inch glass wafer. We conducted cleaning processes under various conditions, i.e., DI water andnitrogen gas at different pressures, using a two-phase-flow nozzle with a gap distance between the nozzle and the substrate. The drying efficiency was also tested using the air-knife with a change in the gap distance between the air-knife and thesubstrate to remove the DI water which remained on the substrate after the two-phase-flow cleaning process. We obtained highefficiency in terms of particle removal as well as good drying efficiency through the optimized conditions of the two-phaseflowcleaning and air-knife processes.
URI
http://koreascience.or.kr/article/JAKO201425560113059.pagehttps://repository.hanyang.ac.kr/handle/20.500.11754/181194
ISSN
1225-0562;2287-7258
DOI
10.3740/MRSK.2014.24.8.429
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE