이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발
- Title
- 이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발
- Other Titles
- Optimization of FPD Cleaning System and Processing by Using a Two-Phase Flow Nozzle
- Author
- 박진구
- Keywords
- flat panel display; two-phase flow nozzle; air-knife; particle removal
- Issue Date
- 2014-00
- Publisher
- 한국재료학회
- Citation
- Korean Journal of Materials Research, v. 24, NO. 8, Page. 429-433
- Abstract
- As the fabrication technology used in FPDs(flat-panel displays) advances, the size of these panels is increasing andthe pattern size is decreasing to the um range. Accordingly, a cleaning process during the FPD fabrication process is becomingmore important to prevent yield reductions. The purpose of this study is to develop a FPD cleaning system and a cleaningprocess using a two-phase flow. The FPD cleaning system consists of two parts, one being a cleaning part which includes atwo-phase flow nozzle, and the other being a drying part which includes an air-knife and a halogen lamp. To evaluate theparticle removal efficiency by means of two-phase flow cleaning, silica particles 1.5 μm in size were contaminated onto a sixinchsilicon wafer and a four-inch glass wafer. We conducted cleaning processes under various conditions, i.e., DI water andnitrogen gas at different pressures, using a two-phase-flow nozzle with a gap distance between the nozzle and the substrate.
The drying efficiency was also tested using the air-knife with a change in the gap distance between the air-knife and thesubstrate to remove the DI water which remained on the substrate after the two-phase-flow cleaning process. We obtained highefficiency in terms of particle removal as well as good drying efficiency through the optimized conditions of the two-phaseflowcleaning and air-knife processes.
- URI
- http://koreascience.or.kr/article/JAKO201425560113059.pagehttps://repository.hanyang.ac.kr/handle/20.500.11754/181194
- ISSN
- 1225-0562;2287-7258
- DOI
- 10.3740/MRSK.2014.24.8.429
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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