전기응집부상을 이용한 탁도 및 TMAH 동시 처리 기작

Abstract

With the rapid development of the high-tech industry, the semiconductor manufacturing industry has become an important industry in many countries and regions. Tetramethyl ammonium hydroxide (TMAH), as an inevitable organic developer, is widely used in the manufacture of various displays and electronic components. Since TMAH solution may cause serious intoxication, the removal of TMAH in electronic wastewater is particularly important. This paper takes TMAH and high turbidity as the research object and uses the electro-coagulation and flotation process to treat it and explores the simultaneous removal effect of turbidity and TMAH under various parameter conditions. To elucidate a mechanism of simultaneous treatment of turbidity and TMAH, it is preliminarily determined that the aluminum alloy is used as an electrode plate, the electrode spacing is kept at 1cm, the electrode plate is 3 pairs, consisting of cathode and anode, and the operating time of each batch experiment is 30 minutes. The electrocoagulation-flotation method has a good effect on the turbidity treatment of wastewater, and the removal ratio is up to 99%. Current density, initial turbidity, pH and other conditions have a significant effect on the reduction of turbidity in the electrolytic treatment of wastewater. Among the various conditions, the factor that has the greatest impact on the reduction of turbidity is pH, and the reduction of pH can greatly increase the turbidity removal rate; followed by the current density, the turbidity removal rate increases with the increase of the current density; Lastly is the initial turbidity. Under the conditions of pH=9, current density of 80A/m2 and initial turbidity of 1500NTU, the turbidity removal rate is as high as 99%. For the removal of TMAH in wastewater by ECF, there are three hypothetical approaches: First, direct coagulation mechanism by aluminum; second, attachment of TMA+ to cathode; last, co-precipitation with the preformed flocs. For the above three possible situations, through the analysis and speculation of the experimental results, it is believed that co-precipitation is the most powerful reason for the reduction of TMAH concentration, and the concentration reduction can reach up to 16%.