Enhancement of cleanliness and deposition rate by understanding the multiple roles of the showerhead electrode in a capacitively coupled plasma reactor
- Title
- Enhancement of cleanliness and deposition rate by understanding the multiple roles of the showerhead electrode in a capacitively coupled plasma reactor
- Author
- 김호준
- Keywords
- showerhead electrode; capacitively coupled plasma; plasma enhanced chemical vapor deposition; computational fluid dynamics; gas transport; fluid simulation; hydrogenated amorphous silicon
- Issue Date
- 2021-08
- Publisher
- MDPI
- Citation
- COATINGS; AUG 2021, 11 8, p999 17p.
- Abstract
- Increasing the productivity of a showerhead-type capacitively coupled plasma (CCP)
reactor requires an in-depth understanding of various physical phenomena related to the showerhead, which is not only responsible for gas distribution, but also acts as the electrode. Thus, we
investigated how to enhance the cleanliness and deposition rate by studying the multiple roles of
the showerhead electrode in a CCP reactor. We analyzed the gas transport in a three-dimensional
complex geometry, and the SiH4/He discharges were simulated in a two-dimensional simplified
geometry. The process volume was installed between the showerhead electrode (radio frequency
powered) and the heater electrode (grounded). Our aim of research was to determine the extent to
which the heated showerhead contributed to increasing the deposition rate and to reducing the size
of the large particles generated during processing. The temperature of the showerhead was increased
to experimentally measure the number of particles transported onto the heater to demonstrate the
effects thereof on the decrease in contamination. The number of particles larger than 45 nm decreased
by approximately 93% when the showerhead temperature increased from 373 to 553 K.
- URI
- https://www.proquest.com/docview/2565074149?accountid=11283https://repository.hanyang.ac.kr/handle/20.500.11754/172458
- ISSN
- 20796412
- DOI
- 10.3390/coatings11080999
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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