Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2022-07-29T00:47:00Z | - |
dc.date.available | 2022-07-29T00:47:00Z | - |
dc.date.issued | 2021-02 | - |
dc.identifier.citation | Solid State Phenomena, v. 314, Page. 197-201 | en_US |
dc.identifier.issn | 1662-9779 | - |
dc.identifier.uri | https://www.scientific.net/SSP.314.197 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/171891 | - |
dc.description.abstract | Megasonic cleaning is one of the promising technologies to remove the particles during semiconductor processing. Acoustic bubble cavitation plays a key role in removing the particles. In this work, the effect of an anionic surfactant sodium dodecyl sulfate (SDS) on a bubble in the presence of hydrogen dissolved DIW water was studied. The bubble dynamics were observed using a highspeed camera. It was found that with the increase of surfactant the bubble characteristics were changed very significantly. Several parameters affecting the bubble dynamics were investigated. | en_US |
dc.language.iso | en | en_US |
dc.publisher | Scientific.net | en_US |
dc.subject | Megasonic cleaning | en_US |
dc.subject | EUV mask cleaning | en_US |
dc.subject | Anionic Surfactant | en_US |
dc.subject | Acoustic cavitation | en_US |
dc.title | Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics | en_US |
dc.type | Article | en_US |
dc.relation.volume | 314 | - |
dc.identifier.doi | 10.4028/www.scientific.net/SSP.314.197 | - |
dc.relation.page | 197-201 | - |
dc.relation.journal | Solid State Phenomena | - |
dc.contributor.googleauthor | Han, SoYoung | - |
dc.contributor.googleauthor | Yerriboina, Nagendra Prasad | - |
dc.contributor.googleauthor | Sahoo, Bichitra Nanda | - |
dc.contributor.googleauthor | Kang, Bong Kyun | - |
dc.contributor.googleauthor | Klipp, Andreas | - |
dc.contributor.googleauthor | Park, Jin Goo | - |
dc.relation.code | 2021035264 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING | - |
dc.identifier.pid | jgpark | - |
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