Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)MECHANICAL ENGINEERING(기계공학과)Articles
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비선형 박판 정밀 이송시스템의 모델링 및 제어
- Title
- 비선형 박판 정밀 이송시스템의 모델링 및 제어
- Other Titles
- The Modeling and Control of a Nonlinear Accurate Thin Film Transfer System
- Author
- 정진태
- Issue Date
- 1999-05
- Publisher
- 한국정밀공학회
- Citation
- 한국정밀공학회 학술발표대회 논문집. 1999-05 1999(5):785-788
- URI
- https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00857656https://repository.hanyang.ac.kr/handle/20.500.11754/171501
- ISSN
- 2005-8446
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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