AlGaN/GaN Schottky-Gate HEMTs With UV/O₃-Treated Gate Interface
- Title
- AlGaN/GaN Schottky-Gate HEMTs With UV/O₃-Treated Gate Interface
- Author
- 정예환
- Keywords
- AlGaN/GaN; Schottky HEMT; UV/O₃
- Issue Date
- 2020-09
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Citation
- IEEE ELECTRON DEVICE LETTERS, v. 41, no. 10
- Abstract
- The surface condition under gate of AlGaN/GaN heterostructure plays a critical role in high-electron mobility transistor (HEMT). In this study, the effects of ultraviolet/ozone (UV/O 3 ) treatment applied to Al 0.3 Ga 0.7 N/GaN heterostructure on the electrical performance of AlGaN/GaN Schottky-gate HEMT were investigated. The reverse-bias leakage current of Schottky diode was reduced by three orders after the treatment. X-ray photoelectron spectroscopy confirms the formation of the Ga 2 O x layer which serves as an interface passivation layer and thus suppresses trap-assisted electron tunneling. Capacitance-voltage measurements of AlGaN/GaN HEMT show shifts of threshold and on-set voltages, indicating decreased surface states as a result of the treatment. The electrical characteristics of AlGaN/GaN HEMT exhibit improved transconductance and subthreshold swing values after the treatment.
- URI
- https://ieeexplore.ieee.org/document/9177086/authors#authorshttps://repository.hanyang.ac.kr/handle/20.500.11754/170519
- ISSN
- 0741-3106; 1558-0563
- DOI
- 10.1109/LED.2020.3019339
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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