자화된 플라즈마내에서의 단분산 입자의 하전량 측정
- Title
- 자화된 플라즈마내에서의 단분산 입자의 하전량 측정
- Other Titles
- Measurement of Monodisperse Particle Charging in Unmagnetized and Magnetized Plasmas
- Author
- 안강호
- Issue Date
- 2000-07
- Publisher
- KAPAR
- Citation
- 한국반도체장비학회지, v. 1, no. 1, page. 35-40
- Abstract
- Understanding of charging properties of a small particle is necessary to control the particle contamination and to improve productivity of the electronic device in the plasma aided semiconductor manufacturing processes. In this study, the effects of both magnetic field and particle size on the charging properties are experimentally investigated in collisional dusty plasmas. The experiments carried out in the system consisted of a monodisperse particle generation system, a DC magnetized plasma generation system and a charge measurement system. The plasma chamber is made of cross-shape Pyrex surrounded by magnetic bucket (composed of 12 permanent magnetic bar) to confine the plasma. DC magnetic field up to 250G are applied to the plasma zone by external magnetic coil. Previous work shows the charging effect clearly increase with increasing the size of the particle and plasma density, as it was expected.
- URI
- https://scienceon.kisti.re.kr/srch/selectPORSrchArticle.do?cn=JAKO200211923081743https://repository.hanyang.ac.kr/handle/20.500.11754/162991
- ISSN
- 1598-6543
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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