전기-수력학적 분사에 의해 합성된 초미세 SiO2입자의 특성

Abstract

Ultrafine particles have been used widely in many high technology industrial areas. The spherical nonagglomerated and unifirm nanometer皿size Si02 particles are synthesized by the direct injection of TEOS(Tetraethyorthosilicate) using electro-hydrodynamic spraying method. Electro-hydrodynamic spray can generate in the range of submicron-size TEOS particles with high electric charge by applying a high electric field between the liquid injection nozzle and the reaction tube. This TEOS particles are thermally decomposed or oxidized to produce nanometresized Si02 particles in the reaction tube. Spherical, nonagglomerated and ultrafine particle generated and examined at furnaced temperature, 8001: and TEOS flowrate of 0.49 orl.00 cm'/hr using SEM and SMPS. As the total gas flowrate changes from 1.5 lpm to 5.0 1pm, the mean diameter of SiO? particle decreases from 120 nm to 68 nm