회전박막제조기의 진동 및 입자발생이 박막제조에 미치는 영향에 관한 연구
- Title
- 회전박막제조기의 진동 및 입자발생이 박막제조에 미치는 영향에 관한 연구
- Other Titles
- A Study on the Effect of the Vibration and Particle Generation of a Spin Coater on Thin Film Coating
- Author
- 정진태
- Keywords
- Thin Film Process(박막공정); Spin Coater(회전박막제조기); Vibraion(진동); Frequency Analysis (주파수분석); Particle Generation(입자발생)
- Issue Date
- 2001-07
- Publisher
- 한국소음진동공학회
- Citation
- 한국소음진동공학회논문집, v. 11, no. 4, page. 31-36
- Abstract
- A spin coater is a machine to coat wafer or LCD display with thin film. Vibration in the spin coater may be one of main troubles in the coating process. In this paper, we focus on the difference be tween two spin coaters. Vibration sources are identified by experimental approach and are compared to find the difference between the two spin coaters. Also, the particle concentration is observed by laser particle counter(LPC) for the two spin coaters, when the spin coaters are working. It is also considered whether the defect rate is proportional to the particle concentration. The result shows that particle generation in the coating process is related to excessive vibration of the spin coater shaft and the particles influence the defect rate of the thin film product.
- URI
- https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE02403044?https://repository.hanyang.ac.kr/handle/20.500.11754/160394
- ISSN
- 1598-2785; 2287-5476
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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