2단계 증착 방법에 의한 ZnO 박막의 c-축 배향성 및 비저항 향상에 관한 연구

Abstract

ZnO thin films are prepared on S i( l 11) substrate by RF magnetron sputtering Two-step deposition method is proposed to obtain ZnO thin films with high c-axis (002) TC value and electrical resistivity. This method consists of the following two-step deposition procedures lst-deposition for 10〜 30 min without oxygen at 100W and 2nd-deposition with oxygen added in the range of 02/(Ar + O2) = 10~50%. SAW filters with IDT/ZnO/Si(l 11) configuration are also fabricated. From the frequency response characteristics, the insertion loss and the side-lobe rejection are estimated.