반응로내 전기-수력학적 분사에 의한 비응집 초미세 SiO2 입자합성과 특성

Abstract

Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size SiO2 particles are synthesized by the direct injection of TEOF(Tetraehyorthosilicate) using electro-hydrodynamic spraying method. Electro-hydrodynamic spraying can generate submicron-size TEOS droplets having high electric charges by applying a high electric field between the liquid injection nozzle and the reaction tube. These TEOS droplets are evaporated, and thermally decomposed or oxidized to produce nanometresized SiO2 particles in the reaction tube. Spherical, nonagglomerated and ultrafine particles are generated in various conditions and examined by using SEM and SMPS. As the total gas flow rate in the furnace changes from 1.5 lpm to 5.0 lpm, the mean diameter of SiO2 particle decreases from 120nm to 68nm. The synthesized particle charging fractions are also investigated.