Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진성 | - |
dc.date.accessioned | 2021-02-23T02:31:26Z | - |
dc.date.available | 2021-02-23T02:31:26Z | - |
dc.date.issued | 2020-03 | - |
dc.identifier.citation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v. 38, no. 2, article no. 022411 | en_US |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.issn | 1520-8559 | - |
dc.identifier.uri | https://avs.scitation.org/doi/10.1116/1.5134055 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/158882 | - |
dc.description.abstract | Molecular layer deposition (MLD) is a thin film technique to make a pure organic coating or hybrid organic–inorganic film, sequentially dosing organic–organic or organic–inorganic precursors, respectively. In this study, hybrid organic–inorganic alucone films were fabricated via MLD using 4-mercaptophenol and trimethylaluminum as organic and metal precursors, respectively, over the deposition temperature range of 100–200 °C. The fabricated film was very stable without degradation when exposed to the atmosphere, and the characteristic change was confirmed through annealing under vacuum at 300–750 °C. After annealing, the thickness of the alucone films decreased and the bonding of the carbon ring changed, as revealed by the spectroscopic ellipsometer, Fourier-transform infrared, Raman, x-ray diffraction, and x-ray photoelectron spectroscopy results. The annealed alucone films showed thermal polymerization, and their carbon ring structures transformed into graphitic carbon flakes. The alucone film annealed at 750 °C showed an electrical resistivity of 0.55 Ω cm. Annealed MLD alucone films, which are hybrid materials, are potential candidates for applications in electronic, capacitor, and thermoelectric devices. | en_US |
dc.description.sponsorship | This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea Government (No. NRF-2017R1D1A1B03034035) and was supported by the MOTIE (Ministry of Trade, Industry & Energy; Project No. 10080633) and KSRC (Korea Semiconductor Research Consortium) support program for the development of the future semiconductor device. | en_US |
dc.language.iso | en | en_US |
dc.publisher | A V S AMER INST PHYSICS | en_US |
dc.subject | RAMAN-SPECTROSCOPY | en_US |
dc.subject | GRAPHENE | en_US |
dc.subject | GROWTH | en_US |
dc.subject | CARBON | en_US |
dc.subject | AL2O3 | en_US |
dc.subject | ENCAPSULATION | en_US |
dc.subject | POLYMER | en_US |
dc.subject | FTIR | en_US |
dc.subject | NANOCOMPOSITE | en_US |
dc.subject | FABRICATION | en_US |
dc.title | Air-stable alucone thin films deposited by molecular layer deposition using a 4-mercaptophenol organic reactant | en_US |
dc.type | Article | en_US |
dc.relation.no | 2 | - |
dc.relation.volume | 38 | - |
dc.identifier.doi | 10.1116/1.5134055 | - |
dc.relation.page | 22411-22411 | - |
dc.relation.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.contributor.googleauthor | Baek, GeonHo | - |
dc.contributor.googleauthor | Lee, Seunghwan | - |
dc.contributor.googleauthor | Lee, Jung-Hoon | - |
dc.contributor.googleauthor | Park, Jin-Seong | - |
dc.relation.code | 2020048759 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | jsparklime | - |
dc.identifier.orcid | https://orcid.org/0000-0002-9070-5666 | - |
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