Effects of substrate temperature on the magnetic properties of as-sputtered FeTaN films
- Title
- Effects of substrate temperature on the magnetic properties of as-sputtered FeTaN films
- Author
- 김희준
- Keywords
- FeTaN; soft magnetism; substrate heating
- Issue Date
- 2001-01
- Publisher
- IEEE
- Citation
- IEEE Transactions on Magnetics, v. 37, issue. 4, page. 2291-2293
- Abstract
- We investigated the magnetic properties of as-sputtered FeTaN films as a function of deposition temperature and composition. At the deposition temperature higher than 200 °C, both soft magnetism and magnetic moments can be fully achieved. While the Ta and N contents in the films affect the magnetic properties, the N content exhibits stronger effects. The magnetic properties are affected by the film microstructures via. crystallinity, grain size, and formation of FexN phases. An excessive N incorporation into the films causes incomplete crystallization and/or formation of Fe3N phases in the as-deposited state, leading to a poor soft magnetic property. As-deposited FeTaN film at the optimum composition of Fe91.7Ta4.2N4.1 gives the best soft magnetic properties; coercivity of ∼2 Oe and permeability of ∼1600 stable up to the frequency of 100 MHz.
- URI
- https://ieeexplore.ieee.org/abstract/document/951151https://repository.hanyang.ac.kr/handle/20.500.11754/158764
- ISSN
- 0018-9464
- DOI
- 10.1109/20.951151
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ELECTRICAL ENGINEERING(전자공학부) > Articles
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