Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)MECHANICAL ENGINEERING(기계공학과)Articles
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dc.contributor.author조남규-
dc.date.accessioned2021-02-04T06:04:58Z-
dc.date.available2021-02-04T06:04:58Z-
dc.date.issued2002-11-
dc.identifier.citationMicro Total Analysis Systems 2002, v. 1, page. 440-442en_US
dc.identifier.isbn978-94-010-3952-9-
dc.identifier.isbn978-94-010-0295-0-
dc.identifier.urihttps://link.springer.com/chapter/10.1007/978-94-010-0295-0_147-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/157880-
dc.description.abstractCVD fluorocarbon (FC) thin films were deposited on mold surfaces such as silicon and SU-8 to reduce the adhesion of surfaces with PDMS during molding processes. FC films coated silicon and SU-8 mold surface showed no degradation of PDMS surfaces and good nanotribological characteristics.en_US
dc.description.sponsorshipThis work was supported by Microbiochip Center in Hanyang University, Korea.en_US
dc.language.isoen_USen_US
dc.publisherKluwer Academic Publishersen_US
dc.subjectMicromoldsen_US
dc.subjectFluorocarbonen_US
dc.subjectPDMSen_US
dc.subjectSoft lithographyen_US
dc.subjectAFMen_US
dc.titleSurface Modification of Micromolds by Flurocarbon Filmsen_US
dc.typeArticleen_US
dc.identifier.doi10.1007/978-94-010-0295-0_147-
dc.contributor.googleauthorKim, Taegon-
dc.contributor.googleauthorKim, Namkyun-
dc.contributor.googleauthorHa, Seung-Mo-
dc.contributor.googleauthorPark, Jin-Goo-
dc.contributor.googleauthorAhn, Yoomin-
dc.contributor.googleauthorLee, Eunkyu-
dc.contributor.googleauthorChai, Younggyu-
dc.contributor.googleauthorCho, Nahmgyoo-
dc.contributor.googleauthorChoo, Jaebum-
dc.contributor.googleauthorHwang, Seungyoung-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF ENGINEERING SCIENCES[E]-
dc.sector.departmentDEPARTMENT OF MECHANICAL ENGINEERING-
dc.identifier.pidngcho-
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