VCM을 이용한 초정밀 위치 제어에 관한 연구

Abstract

This research object is study of the development of a tester mechanism for the mechanical property of optical material. High precision of position and force is important function in this measuring instrument. The goals of the first year include development of high precision position sensing system and actuator. VCM(Voice Coil Motor) is developed as an actuator for a moving device, and studied for modeling with a bond Graph. PID controller is used in VCM control system. Michelson Interferometer is developed for measuring position. Optical parts, interpolator, counter and PD sensor is applied to the system.