Spectroscopic Ellipsometry Study of the Composition of Cobalt/SiO Thin Films
- Title
- Spectroscopic Ellipsometry Study of the Composition of Cobalt/SiO Thin Films
- Other Titles
- Cobalt-SiO 혼합물 박막에 대한 분광 Ellipsometry 연구
- Author
- 안일신
- Issue Date
- 2002-02
- Publisher
- 한양대학교 이학기술연구소
- Citation
- 이학기술연구지, v. 4, page. 27-30
- Abstract
- Co-sputtering with targets of different mixture of cobalt(Co) and SiO was used to control the optical properties of thin films. Effective medium theory was used to deduce the volume fractions of Co and SiO in the film. Also XPS measurements were carried out to deduce the atomic percent of each component in the film. As result, strong correlation was found between the volume fraction and the atomic percent of each composition in the film.
Cobalt(Co)와 SiO가 서로 다르게 섞인 target을 이용한 co-sputtering을 박막의 광학적 물성을 조절하기 위하여 이용하였다. Co와 SiO의 박막에서 volume fractios를 추론하기 위하여 effective medium 이론을 이용하였으며, 또한 각각의 박막에서의 각 성분의 원자적 백분율을 추론하기 위하여 XPS 측정을 하였다. 그 결과, 각 박막에서의 구성 성분의 volume fraction과 원자적 백분율 사이의 상관관계를 찾아내었다.
- URI
- https://www.earticle.net/Article/A106079https://repository.hanyang.ac.kr/handle/20.500.11754/156798
- ISSN
- 2005-9051
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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