Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 한창수 | - |
dc.date.accessioned | 2020-12-31T03:06:47Z | - |
dc.date.available | 2020-12-31T03:06:47Z | - |
dc.date.issued | 2003-12 | - |
dc.identifier.citation | 대한기계학회 2003년 춘계학술대회논문집, page. 1309-1314 | en_US |
dc.identifier.uri | http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00547585? | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/156583 | - |
dc.description.abstract | The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism. | en_US |
dc.description.sponsorship | 본 연구는 산업자원부가 지원하고 있는 차세대 신기술 개발 사업 중 한국기계연구원이 주관하고 있는 고기능 초미세 광열유체 마이크로 부품 기술 개발 사업의 세부과제로서 수행 중이며 이에 관계자 여러분들에게 감사의 말씀을 올립니다. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 대한기계학회 | en_US |
dc.subject | VCM | en_US |
dc.subject | Dual Servo | en_US |
dc.subject | Position Control | en_US |
dc.subject | PQ method | en_US |
dc.subject | Compensator | en_US |
dc.subject | PID Controller | en_US |
dc.subject | Flexure Hinge | en_US |
dc.subject | Capacitive sensor | en_US |
dc.subject | 브시앰 | en_US |
dc.subject | 이중서보 | en_US |
dc.subject | 위치 제어 | en_US |
dc.subject | 보상기 | en_US |
dc.title | 초정밀 위치 제어를 위한 이중 서보시스템의 보상기 설계 | en_US |
dc.title.alternative | Designing Compensators of Dual Servo System For High Precision Positioning | en_US |
dc.type | Article | en_US |
dc.contributor.googleauthor | 최현석 | - |
dc.contributor.googleauthor | 송치우 | - |
dc.contributor.googleauthor | 한창수 | - |
dc.contributor.googleauthor | 최태훈 | - |
dc.contributor.googleauthor | 이낙규 | - |
dc.contributor.googleauthor | 나경환 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF ROBOT ENGINEERING | - |
dc.identifier.pid | cshan | - |
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