A Single Zone Azimuth Calibration for Rotating Compensator Multichannel Ellipsometry

Abstract

A rotating compensator type spectroscopic ellipsometry (RCSE) equipped with a multichannel detector was developed. For accurate data reduction, the azimuth of each optical element should be determined with respect to the plane of incidence. In this paper, we present a spectroscopic single-zone phase calibration method for RCSE utilizing multichannel measurements. With this method, the azimuth of the polarizer could be determined as accurately as in the two-zone phase method, but the time required for calibration process was reduced by half.