Optical Properties of the SiO-Co Composite Thin Films

Abstract

Spectroscopic ellipsometry (SE) and X-ray photoelectron spectroscopy (XPS) were employed to study the composite thin films of SiO and cobalt (Co) prepared by sputtering technique. The optical properties of these films could be expressed as mixtures of SiO and Co using effective medium approximation (EMA) by Bruggeman. When the compositional properties of films analyzed by EMA and XPS were compared, the optical volume of SiO was found to be 5.47 times greater than that of Co.