Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 좌용호 | - |
dc.date.accessioned | 2020-11-03T01:43:09Z | - |
dc.date.available | 2020-11-03T01:43:09Z | - |
dc.date.issued | 2003-01 | - |
dc.identifier.citation | (Materials Letters v.57, no.21, page.3305-3310 | en_US |
dc.identifier.issn | 0167577X | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0167577X03000533 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/155153 | - |
dc.description.abstract | Diamond-like nanocomposite (DLN) films have been deposited on Si substrates using CH4/(C2H5O)4Si/H2/Ar gas mixtures as source gases by conventional plasma-enhanced chemical vapor deposition (PECVD). The film structure was investigated by transmission electron microscope (TEM), Fourier transform infrared spectrometer (FT-IR) and Raman spectrometry. The DLN films deposited mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The mechanical and tribological properties as well as microstructural modifications of the grown films were investigated. In order to understand the characteristics of DLN films, the diamond-like carbon (DLC) films were also prepared using CH4/H2 gases by the same deposition process | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | ELSEVIER SCIENCE BV | en_US |
dc.subject | Diamond-like nanocomposite film | en_US |
dc.subject | PECVD | en_US |
dc.subject | Raman | en_US |
dc.subject | Structural characteristics | en_US |
dc.title | Structural characteristics of diamond-like nanocomposite films grown by PECVD | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1016/S0167-577X(03)00053-3 | - |
dc.relation.journal | MATERIALS LETTERS | - |
dc.contributor.googleauthor | Yang, Won Jae | - |
dc.contributor.googleauthor | Choa, Yong-Ho | - |
dc.contributor.googleauthor | Sekino, Tohru | - |
dc.contributor.googleauthor | Shim, Kwang Bo | - |
dc.contributor.googleauthor | Niihara, Koichi | - |
dc.contributor.googleauthor | Auh, Keun Ho | - |
dc.relation.code | 2009206485 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING | - |
dc.identifier.pid | choa15 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.