Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진석 | - |
dc.date.accessioned | 2020-04-27T07:02:10Z | - |
dc.date.available | 2020-04-27T07:02:10Z | - |
dc.date.issued | 2004-07 | - |
dc.identifier.citation | 2004년도 대한전기학회 하계학술대회 논문집 C, Page. 1700-1702 | en_US |
dc.identifier.uri | http://www.dbpia.co.kr/pdf/pdfView.do?nodeId=NODE01325268&mark=0&useDate=&bookmarkCnt=0&ipRange=N&language=ko_KR | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/151310 | - |
dc.description.abstract | Diamond films including nanocrystallites are grown by microwave plasma chemical vapor deposition using O2 additives and negative substrate bias at growth step. Effects of growth parameters on film properties are characterized by Raman spectra, SEM, and AFM images. It is found that the surface roughness and the microstructure of grown films can be controlled by changing O2 gas ratio. The I V characteristics are also investigated in terms of growth conditions of diamond films. The surface roughness and the sp2 phase of the grown diamond films turn out to be crucial factors for reducing leakage currents at diamond/metal interfaces | en_US |
dc.description.sponsorship | 본 연구는 한양대 전자재료 및 무품 연구센터(EM & O 의 연구시설 및 기자재률 이용하여 수행되었옹. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 대한전기학회 | en_US |
dc.title | 산소첨가가 나노결정 다이아몬드 박막의 구조적 물성 및 금속과의 접합특성에 미치는 영향 | en_US |
dc.title.alternative | Effects of oxygen additive on structural properties and metal/diamond junction characteristics of nano-crystalline diamond thin films | en_US |
dc.type | Article | en_US |
dc.contributor.googleauthor | 최성호 | - |
dc.contributor.googleauthor | 박재현 | - |
dc.contributor.googleauthor | 박창균 | - |
dc.contributor.googleauthor | 박진석 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DIVISION OF ELECTRICAL ENGINEERING | - |
dc.identifier.pid | jinsp | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.