Repository at Hanyang UniversityCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)PHOTONICS AND NANOELECTRONICS(나노광전자학과)Articles
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안일신 | - |
| dc.date.accessioned | 2020-04-22T07:46:32Z | - |
| dc.date.available | 2020-04-22T07:46:32Z | - |
| dc.date.issued | 2004-07 | - |
| dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS, v.43, No. 8B, Page. L1078-L1080 | en_US |
| dc.identifier.issn | 1347-4065 | - |
| dc.identifier.uri | https://iopscience.iop.org/article/10.1143/JJAP.43.L1078/meta | - |
| dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/151196 | - |
| dc.description.abstract | We report a novel etching technique for gold film based on a new phenomenon that gold is soluble in chlorine-containing solutions or solvents under UV irradiation. This is a promising method for gold patterning possibly in microdevice or nanodevice fabrication. Mask patterns can be transferred to a gold surface directly without resorting to a complex photoresist process, and etch rate can be controlled from sub-nanometer to a few tens of nanometers per minute by adjusting exposure parameters. Moreover, nontoxic liquid such as NaCl solution can be used for the process. | en_US |
| dc.description.sponsorship | This work was supported by Grant No. (R11-2002-099) from Quantum Photonics Science Research Center at Hanyang University. The authors also wish to acknowledge the financial support from Hanyang University provided in 2001. | en_US |
| dc.language.iso | en_US | en_US |
| dc.publisher | INST PURE APPLIED PHYSICS | en_US |
| dc.subject | gold | en_US |
| dc.subject | etch | en_US |
| dc.subject | UV | en_US |
| dc.subject | chlorine | en_US |
| dc.subject | patternin | en_US |
| dc.title | Photoinduced patterning of gold thin film | en_US |
| dc.type | Article | en_US |
| dc.identifier.doi | 10.1143/JJAP.43.L1078 | - |
| dc.relation.journal | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | - |
| dc.contributor.googleauthor | An, Ilsin | - |
| dc.contributor.googleauthor | Seong, Deokkyeon | - |
| dc.contributor.googleauthor | Oh, Hyekeun | - |
| dc.relation.code | 2012204501 | - |
| dc.sector.campus | E | - |
| dc.sector.daehak | COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E] | - |
| dc.sector.department | DEPARTMENT OF PHOTONICS AND NANOELECTRONICS | - |
| dc.identifier.pid | ilsin | - |
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