Simultaneous determination of bulk isotropic and surface-induced anisotropic complex dielectric functions of semiconductors from high speed Mueller matrix ellipsometry
- Title
- Simultaneous determination of bulk isotropic and surface-induced anisotropic complex dielectric functions of semiconductors from high speed Mueller matrix ellipsometry
- Author
- 안일신
- Keywords
- Multichannel Mueller matrix ellipsometry; Dual-rotating compensator ellipsometer; Silicon (110) surface; Surface-induced optical anisotropy; Reflectance difference spectroscopy
- Issue Date
- 2004-05
- Publisher
- ELSEVIER SCIENCE SA
- Citation
- THIN SOLID FILMS, v. 455-456, Page. 196-200
- Abstract
- We have measured spectra from ∼2 to 5 eV in all 15 elements of the normalized Mueller matrix for (110) Si at an angle of incidence of θa∼70°, as an initial demanding performance test of a novel dual rotating-compensator multichannel ellipsometer. The Mueller matrix spectra, deduced from 36 waveform integrals collected over a single optical cycle of 0.25 s, can be analyzed to extract the bulk isotropic dielectric function εb=ε1b−iε2b and the surface-induced dielectric function anisotropy Δεs=Δε1s−iΔε2s. Starting from the 15 Mueller matrix elements, six sample parameters are determined, namely the real and imaginary parts of the complex amplitude reflection ratios ρpp, ρps, and ρsp. The surface-induced anisotropic response (Δεs)d=[εs(11̄0)−εs(001)]d is deduced from an average of four independent spectra, two in ρsp and two in ρps=−ρsp using the first order term in d/λ from an expansion of the partial transfer matrix. Here d is the surface anisotropic layer thickness and λ is the vacuum wavelength. Because both the real and imaginary parts of (Δεs)d are now accessible, the results can be fit using a Kramers–Kronig (K–K) consistent oscillator model. The key advantage of the newly-developed instrument is the ability to perform spectroscopic measurements in real time that simultaneously provide bulk isotropic and surface- or interface-induced anisotropic optical responses.
- URI
- https://www.sciencedirect.com/science/article/pii/S0040609004000069#!https://repository.hanyang.ac.kr/handle/20.500.11754/150989
- ISSN
- 0040-6090
- DOI
- 10.1016/j.tsf.2004.01.005
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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