감광성 페이스트 및 후막리소그라피에 의한 미세패터닝 기술
- Title
- 감광성 페이스트 및 후막리소그라피에 의한 미세패터닝 기술
- Other Titles
- Micro-patterning by Thick Film Lithography Using Photoimageable Paste
- Author
- 임종우
- Alternative Author(s)
- Lim, Jong Woo
- Advisor(s)
- 백운규, 김효태
- Issue Date
- 2008-02
- Publisher
- 한양대학교
- Degree
- Master
- Abstract
- Thick film lithography applied photo-lithography in thin film process to conventional thick film process including screen-printing. This technology enables patterns to form finer resolution while compared to the conventional thick film process and a similar level of packaging density can be achieved when compared to thin film or etched thick film circuits. Because of the better edge definition than that of screen-printed patterns, thick film lithography draw a significant attention in the RF/Microwave and integrated LTCC module. In this research, low temperature cofireable ceramic so called LTCC dielectric and conductor pastes, which enabled the formation of thick film fine-via and line using photo-lithographic technology, were developed. The optimum composition for fine patterns was studied by varying the amounts of solid material powder, polymer-monomer ratio, and amount of photoinitiator. The effect of processing parameter such as UV-exposing dose on the formation of fine pattern was also tested. And formation of fine pattern was tested on LTCC green sheet after testing on soda-lime glass wafer as a substrate. The developed photoimageable pastes were printed on substrate, then dried, and exposed to UV-radiation. The formation of fine pattern was tested for multilayer with stacked layer of pastes. Fine pattern formed was a excellent, when buffer layer was coated on LTCC green sheet. As a result, it was found that the ratio of polymer to monomer, solid material loading and the amount of photo-initiator were the main factors affecting the resolution of fine pattern.
- URI
- https://repository.hanyang.ac.kr/handle/20.500.11754/147575http://hanyang.dcollection.net/common/orgView/200000408179
- Appears in Collections:
- GRADUATE SCHOOL[S](대학원) > MATERIALS SCIENCE & ENGINEERING(신소재공학과) > Theses (Master)
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