Soft magnetic properties and high-frequency characteristics of Fe(Co)-based nanocrystalline films

Abstract

The soft magnetic properties and high-frequency characteristics were examined in as-deposited Fe(Co)–B–N nanocrystalline thin films fabricated by a RF magnetron sputtering method. As a result, (Fe0.7Co0.3)84.2B4.6N11.2 and Fe76.1B7.5N16.4 magnetic films showed 4πMs∼15 and 12 kG, Hk∼80 and 12 Oe, and ρ∼180 and 210 μΩ cm, respectively. In addition, the effective μ of these films kept constant values of 150 and 400 up to 1 GHz with the fFMR were measured 3.3 and 2.1 GHz, respectively.