Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 심종인 | - |
dc.date.accessioned | 2020-01-20T02:46:39Z | - |
dc.date.available | 2020-01-20T02:46:39Z | - |
dc.date.issued | 2019-09 | - |
dc.identifier.citation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 75, No. 6, Page. 480-484 | en_US |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.issn | 1976-8524 | - |
dc.identifier.uri | https://link.springer.com/article/10.3938/jkps.75.480 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/122042 | - |
dc.description.abstract | In this study, less bowed light-emitting diodes (LEDs) were fabricated by preparing a LED structure on a sapphire substrate with a SiO2 thin film on its back side. The SiO2 thin film with a low thermal expansion coefficient reduced the bow of the wafer generated by the thermal expansion coefficient difference. As the thickness of SiO2 was increased from 1 μm to 4 μm, the compressive stress in the GaN film was reduced from 16% to 62% with respect to that without SiO2 thin film. The stress reduction in multiple quantum wells also enhanced the internal quantum efficiency of the LED by reducing the piezoelectric field. | en_US |
dc.description.sponsorship | This work was supported by the BK21Plus Seoul National University (SNU) Materials Division for Educating Creative Global Leaders (21A20131912052), Korea. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | KOREAN PHYSICAL SOC | en_US |
dc.subject | Light-emitting diodes | en_US |
dc.subject | Stress relaxation | en_US |
dc.subject | Internal quantum efficiency | en_US |
dc.title | Fabrication of Less Bowed Light-Emitting Diodes on Sapphire Substrates with a SiO2 Thin Film on Their Back Sides | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.3938/jkps.75.480 | - |
dc.relation.page | 480-484 | - |
dc.relation.journal | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.contributor.googleauthor | Lee, Seungmin | - |
dc.contributor.googleauthor | Kim, Jonghak | - |
dc.contributor.googleauthor | Oh, Chan-Hyoung | - |
dc.contributor.googleauthor | Shim, Jong-In | - |
dc.contributor.googleauthor | Park, Yongjo | - |
dc.contributor.googleauthor | Yoon, Euijoon | - |
dc.relation.code | 2019002748 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E] | - |
dc.sector.department | DEPARTMENT OF PHOTONICS AND NANOELECTRONICS | - |
dc.identifier.pid | jishim | - |
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