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dc.contributor.author전형탁-
dc.date.accessioned2019-12-09T01:22:03Z-
dc.date.available2019-12-09T01:22:03Z-
dc.date.issued2018-09-
dc.identifier.citationJOURNAL OF APPLIED PHYSICS, v. 124, no. 11, Article no. 115301en_US
dc.identifier.issn0021-8979-
dc.identifier.issn1089-7550-
dc.identifier.urihttps://aip.scitation.org/doi/10.1063/1.5037500-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/119985-
dc.description.abstractWe theoretically study the H2S adsorption process on (0001) alpha-quartz SiO2 surfaces, which is the preconditioning process for the atomic layer deposition growth of metal sulfide materials. The surface structures of dense and fully hydroxylated (0001) alpha-quartz SiO2 are energetically stable, but their reaction with a H2S molecule is not so active, whereas the cleaved SiO2 surface is chemically reactive to the dissociative adsorption of a H2S molecule with an adsorption energy of -3.08 eV/molecule. On the cleaved surface, we confirm that adsorbed H2S is dissociated into H and H-S fragments, and the energy barrier in this reaction process is computed as 0.042 eV.en_US
dc.description.sponsorshipThis research was supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and future Planning (Nos. 2009-0093818, NRF-2014M3A7B4049367, NRF-2017R1D1A1B03030356).en_US
dc.language.isoen_USen_US
dc.publisherAMER INST PHYSICSen_US
dc.subjectATOMIC LAYER DEPOSITIONen_US
dc.subjectHYDROGEN-SULFIDEen_US
dc.subjectMECHANISMen_US
dc.subjectMOS2en_US
dc.subjectCARBONen_US
dc.titleH2S adsorption process on (0001) alpha-quartz SiO2 surfacesen_US
dc.typeArticleen_US
dc.relation.no11-
dc.relation.volume124-
dc.identifier.doi10.1063/1.5037500-
dc.relation.page1-6-
dc.relation.journalJOURNAL OF APPLIED PHYSICS-
dc.contributor.googleauthorKim, Hye Jung-
dc.contributor.googleauthorJeon, Hyeongtag-
dc.contributor.googleauthorShin, Young-Han-
dc.relation.code2018003651-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF MATERIALS SCIENCE AND ENGINEERING-
dc.identifier.pidhjeon-
dc.identifier.researcherIDP-3193-2015-
dc.identifier.orcidhttp://orcid.org/0000-0003-2502-7413-
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COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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