Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 안일신 | - |
dc.date.accessioned | 2019-11-26T07:17:06Z | - |
dc.date.available | 2019-11-26T07:17:06Z | - |
dc.date.issued | 2019-05 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS, v. 58, No. 5, Article no. 058003 | en_US |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.issn | 1347-4065 | - |
dc.identifier.uri | https://iopscience.iop.org/article/10.7567/1347-4065/ab1646/meta | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/114745 | - |
dc.description.abstract | A micro-spot spectroscopic ellipsometer covering 1.5-4.8 eV is developed using two infinity-corrected reflective objectives. Only a small portion of the entrance pupil in the objective is used to obtain a similar to 50 mu m x 70 mu m spot on a sample. However, non-normal reflections inside the objectives cause experimental errors (up to 2.3 degrees in Delta) when they are arranged symmetrically about a sample. In this paper, we show how to diagnose the polarization errors associated with the reflective objectives and how to deal with them. (C) 2019 The Japan Society of Applied Physics | en_US |
dc.description.sponsorship | This work was supported by the Future Semiconductor Device Technology Development Program (10049185) funded by the Ministry of Trade, Industry and Energy (MOTIE) and Korea Semiconductor Research Consortium (KSRC). | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | IOP PUBLISHING LTD | en_US |
dc.title | Polarization errors associated with reflective objectives in a micro-spot spectroscopic ellipsometer | en_US |
dc.type | Article | en_US |
dc.relation.no | 58 | - |
dc.identifier.doi | 10.7567/1347-4065/ab1646 | - |
dc.relation.page | 580031-580034 | - |
dc.relation.journal | JAPANESE JOURNAL OF APPLIED PHYSICS | - |
dc.contributor.googleauthor | Park, Sungmo | - |
dc.contributor.googleauthor | An, Ilsin | - |
dc.relation.code | 2019002284 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E] | - |
dc.sector.department | DEPARTMENT OF PHOTONICS AND NANOELECTRONICS | - |
dc.identifier.pid | ilsin | - |
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