Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진성 | - |
dc.date.accessioned | 2019-11-21T00:10:54Z | - |
dc.date.available | 2019-11-21T00:10:54Z | - |
dc.date.issued | 2017-02 | - |
dc.identifier.citation | NANOTECHNOLOGY, v. 28, no. 10, Article no. 105401 | en_US |
dc.identifier.issn | 0957-4484 | - |
dc.identifier.issn | 1361-6528 | - |
dc.identifier.uri | https://iopscience.iop.org/article/10.1088/1361-6528/aa5985 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/112930 | - |
dc.description.abstract | The thermal conductivity of superlattice films is generally anisotropic and should be studied separately in the in-plane and cross-plane directions of the films. However, previous works have mostly focused on the cross-plane thermal conductivity because the electrons and phonons in the cross-plane direction of superlattice films may result in much stronger interface scattering than that in the in-plane direction. Nevertheless, it is highly desirable to perform systematic studies on the effect of interface formation in semiconducting superlattice films on both in-plane and cross-plane thermal conductivities. In this study, we determine both the in-plane and cross-plane thermal conductivities of Al2O3 (AO)/ZnO superlattice films grown by atomic layer deposition (ALD) on SiO2/Si substrates in the temperature range of 50-300 K by the four-point-probe 3-omega method. Our experimental results indicate that the formation of an atomic AO layer (0.82 nm) significantly contributes to the decrease of the cross-plane thermal conductivity of the AO/ZnO superlattice films compared with that of AO/ZnO thin films. The cross-plane thermal conductivity (0.26-0.63W m(-1) K-1 of the AO/ZnO superlattice films (with an AO layer of similar to 0.82 nm thickness) is approximately similar to 150%-370% less than the in-plane thermal conductivity (0.96-1.19W m-1 K-1) of the corresponding film, implying significant anisotropy. This indicates that the suppression of the cross-plane thermal conductivity is mainly attributed to the superlattice, rather than the nanograin columnar structure in the films. In addition, we theoretically analyzed strong anisotropic behavior of the in-plane and cross-plane thermal conductivities of the AO/ZnO superlattice films in terms of temperature dependence. | en_US |
dc.description.sponsorship | This study was supported by the Priority Research Centers Program and by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (2009-00938817, 2015R1A2A1A15055313, and 2016R1A2B2012909). | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | IOP PUBLISHING LTD | en_US |
dc.subject | thermal conductivity | en_US |
dc.subject | superlattice films | en_US |
dc.subject | phonon scattering | en_US |
dc.subject | 3-omega measurement | en_US |
dc.title | Anisotropic temperature-dependent thermal conductivity by an Al2O3 interlayer in Al2O3/ZnO superiattice films | en_US |
dc.type | Article | en_US |
dc.relation.no | 10 | - |
dc.relation.volume | 28 | - |
dc.identifier.doi | 10.1088/1361-6528/aa5985 | - |
dc.relation.page | 1-10 | - |
dc.relation.journal | NANOTECHNOLOGY | - |
dc.contributor.googleauthor | Lee, Won-Yong | - |
dc.contributor.googleauthor | Lee, Jung-Hoon | - |
dc.contributor.googleauthor | Ahn, Jae-Young | - |
dc.contributor.googleauthor | Park, Tae-Hyun | - |
dc.contributor.googleauthor | Park, No-Won | - |
dc.contributor.googleauthor | Kim, Gil-Sung | - |
dc.contributor.googleauthor | Park, Jin-Seong | - |
dc.contributor.googleauthor | Lee, Sang-Kwon | - |
dc.relation.code | 2017001039 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | jsparklime | - |
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