Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry
- Title
- Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry
- Author
- 안일신
- Keywords
- spectroscopy; compensator; ellipsometry; retardance; rubbing; polyimide
- Issue Date
- 2005-10
- Publisher
- INST PURE APPLIED PHYSICS
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v. 44, No. 10, Page. 7667-7670
- Abstract
- Rotating compensator spectroscopic ellipsometry was used to study the optical properties of a rubbed polyimide layer. Two operating modes in the transmission configuration were studied. One was a conventional mode of 'polarizer-sample-rotating compensator-analyzer'. The other was a dual rotation mode of 'polarizer-rotating sample-rotating compensator-analyzer'. We found that calibration is not possible in the conventional mode due to the extremely small retardance and non-dichroic nature of the sample. Meanwhile, in dual rotation mode which we developed, a retardance smaller than 0.5 degrees could be measured without calibration. Using this technique, the variation in retardance with rubbing could be easily determined over a range of 320-800 nm. The optical axis could also be determined with high precision for this sample, and this optical axis was found to be parallel to the direction of rubbing.
- URI
- https://iopscience.iop.org/article/10.1143/JJAP.44.7667https://repository.hanyang.ac.kr/handle/20.500.11754/111675
- ISSN
- 0021-4922
- DOI
- 10.1143/JJAP.44.7667
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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