22 0

Calibration-Free Multichannel Ellipsometry for Retardance Measurement

Title
Calibration-Free Multichannel Ellipsometry for Retardance Measurement
Author
안일신
Issue Date
2005-06
Publisher
KOREAN PHYSICAL SOC
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 46, No. 9, Page. 142-145
Abstract
When rotating sample configurations are adopted in transmission ellipsometry, the retardance of a sample can be measured without a calibration process to find the azimuths of optical elements. Two configurations are employed: (1) rotation of sample between polarizer and analyzer whose transmission axes are fixed in parallel; (2) dual rotations of sample and compensator between polarizer and analyzer. The former is simple in design. Meanwhile, the latter shows high sensitivity for low retardance. As the transmission axes of both polarizer and analyzer are fixed in these configurations, any errors related to the source polarization or polarization sensitivity of the detector can be avoided. Moreover, both systems are easy to construct, because complicated electronics are not required to control the azimuths of optical elements. By using a multichannel detection system, retardance over 300 to 800 nm can be measured in a simple and fast way.
URI
http://www.jkps.or.kr/journal/view.html?uid=7068&vmd=Fullhttp://repository.hanyang.ac.kr/handle/20.500.11754/110883
ISSN
0374-4884; 1976-8524
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE