Simple structured polydimethylsiloxane microvalve actuated by external air pressure
- Title
- Simple structured polydimethylsiloxane microvalve actuated by external air pressure
- Author
- 안유민
- Keywords
- polydimethylsiloxane microvalve; pneumatic actuation; replica moulding
- Issue Date
- 2006-08
- Publisher
- PROFESSIONAL ENGINEERING PUBLISHING LTD
- Citation
- PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, v. 220, No. 8, Page. 1283-1288
- Abstract
- This article describes a simple structured microvalve made of polydimethylsiloxane (PDMS) and glass. For easy operation, the microvalve is actuated by external air pressure. The microvalve is fabricated by replica moulding using a negative photoresist (SU-8) as the mould. For low cost and biocompatibility, PDMS is used as the chip material. The PDMS valve is bonded to a Pyrex glass substrate using an O-2 plasma surface treatment. It was found that no leakage occurs under a valve-actuating air pressure of 0.35 MPa when the injection pressure of liquid in the microchannel of the valve is 0.01-0.04 MPa. The fabricated microvalve is applied to a microfluidic chip having one inlet and two outlet channels. Fluid flow is controlled by the microvalve.
- URI
- https://journals.sagepub.com/doi/abs/10.1243/09544062jmes177https://repository.hanyang.ac.kr/handle/20.500.11754/108440
- ISSN
- 0954-4062
- DOI
- 10.1243/09544062JMES177
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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