Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 한창수 | - |
dc.date.accessioned | 2019-06-13T05:18:25Z | - |
dc.date.available | 2019-06-13T05:18:25Z | - |
dc.date.issued | 2007-05 | - |
dc.identifier.citation | 한국공작기계학회 2007 춘계학술대회 논문집, Page. 787 - 791 | en_US |
dc.identifier.uri | http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00928532&language=ko_KR | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/106545 | - |
dc.description.abstract | Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is measured and analyzed. The simple rotary stage is measured radial error components by one capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 한국공작기계학회 | en_US |
dc.subject | PZT | en_US |
dc.subject | Axis of Rotation | en_US |
dc.subject | Radial Error | en_US |
dc.title | PZT로 구동되는 회전 스테이지의 오차 운동 분석에 관한 연구 | en_US |
dc.title.alternative | A Study on Error Motion Analysis of Rotary Stage Driven By PZT | en_US |
dc.type | Article | en_US |
dc.contributor.googleauthor | 김진호 | - |
dc.contributor.googleauthor | 신동익 | - |
dc.contributor.googleauthor | 윤덕원 | - |
dc.contributor.googleauthor | 한창수 | - |
dc.contributor.googleauthor | 이상무 | - |
dc.contributor.googleauthor | 남경태 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF ROBOT ENGINEERING | - |
dc.identifier.pid | cshan | - |
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