PZT로 구동되는 회전 스테이지의 오차 운동 분석
- Title
- PZT로 구동되는 회전 스테이지의 오차 운동 분석
- Other Titles
- An Error Motion Analysis of Rotary Stage Driven By PZT
- Author
- 한창수
- Keywords
- PZT actuator(압전 액츄에이터); Axis of Rotation(회전축); Error Motion(오차 운동)
- Issue Date
- 2008-02
- Publisher
- 한국생산제조학회
- Citation
- 한국공작기계학회 논문집, v. 17, No. 1, Page. 132-136
- Abstract
- Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.
- URI
- http://www.dbpia.co.kr/Journal/ArticleDetail/NODE00962426https://repository.hanyang.ac.kr/handle/20.500.11754/104342
- ISSN
- 2508-5093
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ROBOT ENGINEERING(로봇공학과) > Articles
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