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DENSITY CONTROL OF ZINC OXIDE NANOROD ARRAYS USING ULTRATHIN SEED LAYER BY ATOMIC LAYER DEPOSITION

Title
DENSITY CONTROL OF ZINC OXIDE NANOROD ARRAYS USING ULTRATHIN SEED LAYER BY ATOMIC LAYER DEPOSITION
Author
Minwook Bang
Alternative Author(s)
방민욱
Advisor(s)
전형탁
Issue Date
2019-02
Publisher
한양대학교
Degree
Master
Abstract
The effect of Zinc Oxide (ZnO) seed layer thickness on the density of ZnO nanorod arrays was investigated. ZnO has been deposited using two distinct processes consisting of the seed layer deposition using ALD and subsequent hydrothermal ZnO growth. Due to the coexistence of the growth and dissociation during ZnO hydrothermal growth process on the seed layer, the thickness of seed layer plays a critical role in determining the nanorod growth and morphology. The optimized thickness resulted in the regular ZnO nanorod growth. Moreover, the introduction of ALD to form the seed layer facilitates the growth of the nanorods on ultrathin seed layer and enables the densification of nanorods with a narrow change in the seed layer thickness. This study demonstrates that ALD technique can produce densely packed, virtually defect-free, and highly uniform seed layers and two distinctive processes may form ZnO as the final product via the initial nucleation step consisting of the reaction between Zn2+ ions from respective zinc precursors and OH- ions from H2O
URI
https://repository.hanyang.ac.kr/handle/20.500.11754/99371http://hanyang.dcollection.net/common/orgView/200000434428
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > MATERIALS SCIENCE & ENGINEERING(신소재공학과) > Theses (Master)
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